Sample: Ti/Si50nm-2h Ungroup Processes
50 nm Si Deposition and Oxidation Isothermal Exposure - 2h (1)
- Time:
- 2 h
- Cooling Type:
- { "name": "Gas Cooled", "value": "gas_cooled" }
- Temperature:
- 800 C
- Cooling Rate:
- No value
Hardness Profiles (1)
- Load:
- 0.001 N
- Type:
- No value
- Dwell Time:
- 2 s
Files
Sectioning (1)
- Notes:
- Sectioned output samples using slow speed diamond saw
SEM (1)
- Current:
- 0.4 nA
- Specimen/Stage Bias:
- No value V
- Stage Tilt:
- No value degrees
- Detector:
- { "name": "Secondary", "value": "secondary" }
- Working Distance:
- 5 mm
- Magnification:
- 15000
- Stage:
- { "name": "Standard", "value": "standard" }
- Voltage:
- 5 kV
Files
STEM EDS (1)
- Camera Length:
- No value
- Spot Size:
- No value
- Mode:
- { "name": "Scanning z-contrast", "value": "scanning_z_contrast" }
- Conventional Scanning:
- { "name": "Yes", "value": "yes" }
- Apparatus:
- Hitachi HD-2300
- Voltage:
- 200 kV
- Stage:
- { "name": "Standard", "value": "standard" }
- Scanning:
- No value
Files
- STEM EDS - Pure Ti, 50 nm Si, 2 hr oxidation, 800C, 20% O2 - O EDS Map.tif
- STEM EDS - Pure Ti, 50 nm Si, 2 hr oxidation, 800C, 20% O2 - Pt EDS Map.tif
- STEM EDS - Pure Ti, 50 nm Si, 2 hr oxidation, 800C, 20% O2 - Si EDS Map.tif
- STEM EDS - Pure Ti, 50 nm Si, 2 hr oxidation, 800C, 20% O2 - Ti EDS Map.tif
- STEM Z Contrast - Pure Ti, 50 nm Si, 2 hour oxidation, 800C, 20% O2 -50 kx.TIF
TEM (1)
- Stage:
- { "name": "Standard", "value": "standard" }
- Apparatus:
- JEOL 2010F AEM
- Scanning:
- { "name": "Bright Field", "value": "bright_field" }
- Voltage:
- 200 kV
- Spot Size:
- No value
- Mode:
- { "name": "Diffraction Imaging", "value": "diffraction_imaging" }
- Conventional Scanning:
- { "name": "Yes", "value": "yes" }
- Camera Length:
- No value