Sample: Ti/Si50nm-2h Ungroup Processes
Last Updated: 4 years ago Owner: Kathleen Chou ID: 6800
50 nm Si Deposition and Oxidation Isothermal Exposure - 2h (1)
Time:
2 h
Cooling Type:
{ "name": "Gas Cooled", "value": "gas_cooled" }
Temperature:
800 C
Cooling Rate:
No value
Hardness Profiles (1)
Load:
0.001 N
Type:
No value
Dwell Time:
2 s
Files
Sectioning (1)
Notes:
Sectioned output samples using slow speed diamond saw
SEM (1)
Current:
0.4 nA
Specimen/Stage Bias:
No value V
Stage Tilt:
No value degrees
Detector:
{ "name": "Secondary", "value": "secondary" }
Working Distance:
5 mm
Magnification:
15000
Stage:
{ "name": "Standard", "value": "standard" }
Voltage:
5 kV
Files
STEM EDS (1)
Camera Length:
No value
Spot Size:
No value
Mode:
{ "name": "Scanning z-contrast", "value": "scanning_z_contrast" }
Conventional Scanning:
{ "name": "Yes", "value": "yes" }
Apparatus:
Hitachi HD-2300
Voltage:
200 kV
Stage:
{ "name": "Standard", "value": "standard" }
Scanning:
No value
Files
TEM (1)
Stage:
{ "name": "Standard", "value": "standard" }
Apparatus:
JEOL 2010F AEM
Scanning:
{ "name": "Bright Field", "value": "bright_field" }
Voltage:
200 kV
Spot Size:
No value
Mode:
{ "name": "Diffraction Imaging", "value": "diffraction_imaging" }
Conventional Scanning:
{ "name": "Yes", "value": "yes" }
Camera Length:
No value
Files