Sample: Ti/Si50nm-8h Ungroup Processes
Last Updated: 4 years ago Owner: Kathleen Chou ID: 6803
50 nm Si Deposition and Oxidation Isothermal Exposure - 8h (1)
Temperature:
800 C
Cooling Type:
{ "name": "Gas Cooled", "value": "gas_cooled" }
Cooling Rate:
No value
Time:
8 h
Hardness Profiles (1)
Type:
No value
Load:
0.001 N
Dwell Time:
2 s
Files
Sectioning (1)
Notes:
Sectioned output samples using slow speed diamond saw
SEM (1)
Specimen/Stage Bias:
No value V
Working Distance:
5 mm
Detector:
{ "name": "Secondary", "value": "secondary" }
Stage Tilt:
No value degrees
Magnification:
15000
Voltage:
5 kV
Current:
0.4 nA
Stage:
{ "name": "Standard", "value": "standard" }
Files
STEM EDS (1)
Scanning:
No value
Voltage:
200 kV
Conventional Scanning:
{ "name": "Yes", "value": "yes" }
Stage:
{ "name": "Standard", "value": "standard" }
Apparatus:
Hitachi HD-2300
Spot Size:
No value
Camera Length:
No value
Mode:
{ "name": "Scanning z-contrast", "value": "scanning_z_contrast" }
Files
TEM (1)
Voltage:
200 kV
Conventional Scanning:
{ "name": "Yes", "value": "yes" }
Scanning:
{ "name": "Bright Field", "value": "bright_field" }
Spot Size:
No value
Camera Length:
No value
Stage:
{ "name": "Standard", "value": "standard" }
Apparatus:
JEOL 2010F AEM
Mode:
{ "name": "Diffraction Imaging", "value": "diffraction_imaging" }
Files